Rectangular planar magnetron
Gencoa have a well-established track record of providing rectangular planar magnetrons and technology for coating of flexible substrates, architectural glass, solar cells, displays, touch screens and semiconductor wafers. In particular, the electrical insulation of our cathodes mean we are the partner of choice for any high power RF or HIPIMS application.
Robust design, low maintenance costs, and a wide range of magnetic options available.
Arrangement of a pair of planar magnetrons onto a single mounting flange, available with a choice of mounting styles.
A recent introduction to Gencoa's rectangular range, designed to meet the demanding requirements of a small format magnetron.
High target use and a clean target surface, delivering high quality films and long target lifetimes.
Part of the Vtech range of products, providing precise film uniformity adjustments of sputtered layers.
Replacement magnetic systems to existing planar magnetrons for increased performance or replacement of defective magnets.
- Gencoa rectangular magnetron flyer
- Rectangular VTFLEX
- Magnetic options for planar magnetrons
- Rectangular target details
- Water cooling options
- 12-13 March 2024 - ALD for Industry
- 6-9 May 2024 - SVC Techcon 2024
- 15-16 May 2024 - Advanced Materials Show
- 29-30 May 2024 - Pour le Vide
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