Rectangular XH magnetron

Rectangular XH magnetrons deliver market-leading material efficiency for 150mm wide planar sputter targets, and a clean target surface to provide high quality films and long target lifetimes.

Combining the standard features of Gencoa planar magnetrons with the benefit of longer lifetimes and lower material costs, XH magnetrons are designed for applications using expensive target materials or where higher system uptime is required.

Examples of typical uses for the XH magnetron are:

• Extended campaign lengths of up to three times longer than a standard source
• Lower target material costs through high target use (more than double the target usage of a standard source, and more than 50% greater target usage than a HY source)
• Deposition of materials that are difficult from a rotatable target shape
• Deposition of materials that need to avoid a water to vacuum seal (e.g. Lithium)
• ITO low voltage sputtering with high target use
• HOT target option for ITO tiles
• Architectural glass sputtering of silver for 50% savings on silver target cost based upon 150mm wide targets, 25mm thick
• Architectural 300mm wide XH option for >200 kg of sputter silver material

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