Large circular
Gencoa’s large circular magnetrons are available in target sizes ranging from 6" to 16", and with a choice of magnetic and mechanical options to suit a range of applications.
Every option is built to the high build standards that has become the trademark of Gencoa's products, and a 10 year warranty is offered on the magnetic arrays of 6" target sizes or greater.
Mechanical Options
Gencoa standard circular magnetrons come with a wide choice of mechanical options. All magnetrons are available for internal or external mount. Mechanical options for each target size are detailed in the table below. For target sizes of 2" to 5", refer to Gencoa's 3G circular magnetron range.
6" | 8" | 10" | 12" | 14" | 16" | |
Tilting shaft mount | • | • | • | • | • | • |
Gas Injection | • | • | • | • | • | • |
RF Power Option | • | • | • | • | • | • |
Anode Cooling | • | • | • | • | • | • |
Manual Shutter | • | • | • | • | • | • |
Auto Shutter | • | • | • | • | • | • |
Sputter Chimney | • | • | • | • | • | • |
Wallmount feedthrough | • | • | • | • | • | • |
Hidden anode | • | • | • | • | • | • |
Magnetic Options
As standard, Gencoa provide a balanced (SW) magnetic array on its standard circular magnetrons. Additional magnetic options are available for each target size, as detailed below.
6" | 8" | 10" | 12" | 14" | 16" | |
Balanced (SW) | • | • | ||||
Unbalanced (PP) | • | • | ||||
High Yield (HY) | • | • | • | • | • | • |
High Uniformity (HU) | • | • | • | • | • | • |
High Strength (HS) | • | • | • | • | • | • |
Gallery
![Gencoa circular magnetron](https://www.gencoa.com/resources/images/gallery/showThumb.aspx?img=std-circular-0238.jpg)
![Gencoa circular magnetron](https://www.gencoa.com/resources/images/gallery/showThumb.aspx?img=std-circular-0250.jpg)
![Gencoa circular magnetron with tilt mechanism](https://www.gencoa.com/resources/images/gallery/showThumb.aspx?img=std-circular-0307.jpg)
![Gencoa circular magnetron](https://www.gencoa.com/resources/images/gallery/showThumb.aspx?img=std-circular_0306.jpg)
![Circular magnetron target erosion](https://www.gencoa.com/resources/images/gallery/showThumb.aspx?img=circular-target-erosion.jpg)
![Circular magnetron cluster with open shutter](https://www.gencoa.com/resources/images/gallery/showThumb.aspx?img=circular-plasma-shutter-open.jpg)
![Circular magnetron plasma with closed shutter](https://www.gencoa.com/resources/images/gallery/showThumb.aspx?img=circular-plasma-shutter-closed.jpg)
![Circular magnetron plasma](https://www.gencoa.com/resources/images/gallery/showThumb.aspx?img=gencoa-circular-plasma-4.jpg)
![Circular magnetron plasma](https://www.gencoa.com/resources/images/gallery/showThumb.aspx?img=gencoa-circular-plasma-3.jpg)
![Circular magnetron plasma](https://www.gencoa.com/resources/images/gallery/showThumb.aspx?img=gencoa-circular-plasma-2.jpg)
![Circular magnetron plasma](https://www.gencoa.com/resources/images/gallery/showThumb.aspx?img=gencoa-circular-plasma-1.jpg)
![Gencoa circular cluster](https://www.gencoa.com/resources/images/gallery/showThumb.aspx?img=gencoa-circular-cluster-2.jpg)
![Circular cluster](https://www.gencoa.com/resources/images/gallery/showThumb.aspx?img=circular-cluster.jpg)
![Circular magnetron cluster](https://www.gencoa.com/resources/images/gallery/showThumb.aspx?img=gencoa-circular-cluster.jpg)
![10" standard circular magnetron](https://www.gencoa.com/resources/images/gallery/showThumb.aspx?img=std-circular-10inch.jpg)
![8" circular magnetron](https://www.gencoa.com/resources/images/gallery/showThumb.aspx?img=std-8inch-circular.jpg)
![6" circular magnetron](https://www.gencoa.com/resources/images/gallery/showThumb.aspx?img=std-6inch-circular-options.jpg)
![6" circular magnetron](https://www.gencoa.com/resources/images/gallery/showThumb.aspx?img=std-6inch-circular-front.jpg)
![10" circular magnetron](https://www.gencoa.com/resources/images/gallery/showThumb.aspx?img=std-10-inch-circular.jpg)
Downloads
Related Applications
Upcoming Events
![Gencoa exhibitions Gencoa exhibitions](https://www.gencoa.com/images/exhibition-thumb.png)
- 4-7 August 2024 - ALD/ALE 2024
- 2-5 September 2024 - Plasma Surface Engineering 2024
- 29 September - 2 October 2024 - Euro PM2024 Congress & Exhibition
- 30 September - 3 October 2024 - IMAT 2024
- View full list >