Retrofit magnetics

Gencoa offer a retrofit service for installing replacement magnetic systems to existing planar cathodes – providing a cost-effective method of upgrading the performance of an existing system.

Almost any existing magnetron can be fitted with Gencoa’s standard balanced (SW) or unbalanced (PP) magnetic systems. In most existing units, Gencoa high yield (HY) type magnetics can also be installed.

Several main reasons lead to a need for replacement magnets, including:

• Defective magnets caused either by corrosion of magnets located in water, or over-heating and degaussing of the magnets
• To increase target utilization
• To increase magnetic field strength for low pressure/voltage or magnetic material sputtering
• To improve coating uniformity in both circular and rectangular geometries
• To enhance plasma reactivity and energy by unbalancing the magnetic field
• To reduce arcing by avoiding closed magnetic field interactions with system anodes
• To achieve cleaner targets, especially in reactive sputtering

Contact [email protected] with details of your current cathodes and required magnetics to discuss the available options for a planar magnetron retrofit.

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