Power supplies

The iM300 and iM3000 offer a complete solution for Gencoa IM type linear and circular plasma sources. All of the functions needed to operate the source are built-in.

The only user action is to connect the high voltage cable and the mass flow controller.

The necessary control sequence and power delivery is performed by the iM300 and iM3000 controller.

The unit is equipped with a modern, IGBT based resonant converter and the overall operation is handled with a microcontroller subsystem.

Both units can provide ~2.8kV strike voltage and 2.5A short circuit current.

Max output power is 500W @2500V output voltage for the iM300 and 4000W @2000V output voltage.for the iM3000

The built in software can drive external mass flow controller to mantain the source voltage (and so the beam energy) at a preset value. The features of the iM300 and iM3000 makes setup, operation and regulation of the plasma source very straight-forward.

Specifications

	iM3000	iM300
Unit	rack 19“ 4 HU	1/2 rack 19" 3 HU
Main	400 VAC 3 Ph	240 or 110 VAC with switch selector inside
Voltage strike	3 Kvolt positive	3 KVolt positive
Nominal voltage	2500 V/4 kW	2500 V/500 Watt
Short circuit current	2 A	300 mA
Regulation mode	Current (5 mA resolution)	Current (0.5 mA resolution)
Output connector	FISHER HV female mod 105	BNC SHV female
MFC	2 channels analog 0/5 VDC	2 channels analog 0/5 VDC
Display	Touch screen 240 x 128 pixel	Touch screen 240 x 128 pixel
Interlock/remote	9 pin D type	9 pin D type
RS 232	9 pin D type	9 pin D type
Regulation mode	Internal costant gas flow, or gas feedback (costant voltage), via external RS 232 or analog user port	Internal constant gas flow, or gas feedback (constant voltage), via external RS 232 or analog user port